Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*100 mm wafers | *100 mm wafers | ||
*150 mm wafers | *150 mm wafers | ||
*200 mm wafers | *200 mm wafers (may require tool change) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*2" or 50 mm wafers | *2" or 50 mm wafers | ||