Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch using HF: Difference between revisions
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The etch rates: | The etch rates: | ||
<ul> | <ul> | ||
<li> <p>5% HF → <b>1.74 nm/s</b> </p></li> | <li><p>5% HF → <b>1.74 nm/s</b></p></li> | ||
<li> 1vol. H<sub>2</sub>O : 1vol. 5% HF <b>1.05 nm/s</b> </li> | <li><p> 1vol. H<sub>2</sub>O : 1vol. 5% HF → <b>1.05 nm/s</b></p></li> | ||
<li> 2vol. H<sub>2</sub>O : 1vol. 5% HF <b>0.72 nm/s</b> </li> | <li><p> 2vol. H<sub>2</sub>O : 1vol. 5% HF → <b>0.72 nm/s</b></p></li> | ||
</ul> | </ul> | ||