Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch using HF: Difference between revisions
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=== Experiment and results === | === Experiment and results === | ||
Si samples with about 100 nm of ALD deposited Al<sub>2</sub>O<sub>3</sub> has been etched in different HF concentrations. After the etching, the thickness of the Al<sub>2</sub>O<sub>3</sub> layer has been measured, and the thickness as function of time has been plotted as shown in the graph below. | Si samples with about 100 nm of ALD deposited Al<sub>2</sub>O<sub>3</sub> (1000 cycles at 300C) has been etched in different HF concentrations. After the etching, the thickness of the Al<sub>2</sub>O<sub>3</sub> layer has been measured, and the thickness as function of time has been plotted as shown in the graph below. | ||