Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
| Line 72: | Line 72: | ||
|style="background:WhiteSmoke; color:black"|'''Four point probe - Veeco''' | |style="background:WhiteSmoke; color:black"|'''Four point probe - Veeco''' | ||
|- | |- | ||
|Purpose | |'''Purpose''' | ||
|Measure voltage, sheet resistance or volume resistivity at varied current | |Measure voltage, sheet resistance or volume resistivity at varied current | ||
|Measure resistance, resistivity or film thickness(*) at 100uA | |Measure resistance, resistivity or film thickness(*) at 100uA | ||
|- | |- | ||
|Unit | |'''Unit''' | ||
|mV, ohm/square, ohm.cm(wafer), ohm.cm(volume) | |mV, ohm/square, ohm.cm(wafer), ohm.cm(volume) | ||
|ohm/square, ohm.cm, | |ohm/square, ohm.cm, | ||
|- | |- | ||
|Substrate | |'''Substrate''' | ||
|Small pieces up to 200mm wafer | |Small pieces up to 200mm wafer | ||
|Only 4inch or 6inch wafer | |Only 4inch or 6inch wafer | ||