Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic: Difference between revisions
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! no name, tested by Lior Shiv@Capres 2019- | ! no name, tested by Lior Shiv@Capres 2019-07-12 <!--Recipe Name --> | ||
| A <!--Step --> | | A <!--Step --> | ||
| 20 <!--Temperature --> | | 20 <!--Temperature --> | ||