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*[[Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace|Wet oxidation in Anneal-oxide furnace (C1)]]
*[[Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace|Wet oxidation in Anneal-oxide furnace (C1)]]
==Standard recipes in the oxidation furnaces==
The steps in the standard oxidation recipes in the A-stack furnaces (A1, A2 and A3) and the C-stack furnaces (C1, C3 and C4) can be found here:
*[[Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes]]


==Comparison of the seven oxidation furnaces==
==Comparison of the seven oxidation furnaces==
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