Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions

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 [[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]]
-'''The Four point probe is manufactured by Jandel Engineering Limited''' and using Jandel probe head, a cylindrical probe type B: 1.00 mm spacing, 100 micron tip radius, 100g load linear is being use at Nanolab.and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV.
+'''The Four point probe is manufactured by Jandel Engineering Limited''' and using Jandel probe head, a cylindrical probe type B: 1.00 mm spacing, 100 micron tip radius, 100g load linear is being use at Nanolab and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV. The unit supplies a constant current and can display the resultant voltage, sheet resistance or volume resistivity depending which function has been chosen. For calculation of volume resistivity (for wafers or bulk samples) it is possible to input wafer thickness or probe spacing as required.
 For sheet resistance measurements, the quoted range is 1 milliohm/square to 5x108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy.