Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Adjustable temperature, contact bake | Adjustable temperature, contact bake | ||
*Soft bake | |||
*PEB | |||
*Hard bake | |||
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Recipe dependent temperature, contact or proximity bake | Recipe dependent temperature, contact or proximity bake | ||
*Soft bake | |||
*PEB | |||
*Hard bake | |||
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Manual convection bake | Manual convection bake | ||
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Manual convection bake | Manual convection bake | ||
*Dehydration | *Dehydration | ||
*'''NO resist!''' | |||
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