Specific Process Knowledge/Pattern Design: Difference between revisions
| Line 57: | Line 57: | ||
=== How to order a mask=== | === How to order a mask=== | ||
<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | |||
Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature sized can be 0.8µm, 1µm or 1.5µm which is reflected in the price. | |||
The masks have to be ordered in Procure. Nanolab cannot order the mask for you but we do offer a final check of the design and mask specifications before you place the order. | |||
If you are using L-edit to design your mask you should remember to mark the top cell as the fabrication cell (a small pink <b style="color:magenta">''f''</b> should show to the left of the cell name in the Design Navigator. | |||
Remember to make only the layers for fabrication visible. The remaining should be invisible. | |||
Give each layer appropriate GDS number respectively CIF names before exporting the file. This is done by double click on the layers and fill out the window that pops up. | |||
We can also provide guidance regarding the mask design phase. Please contact the mask team, E-mail address can be found in [[Danchip_contact_information]]. | |||
=== Old procedure for How to order a mask=== | |||
Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | ||
The smallest feature size obtainable from Delta Mask is 1.5 µm. If you need structures smaller than this please write it specificly in the e-mail. Be aware that this will increase the price by at least a factor of 3. | The smallest feature size obtainable from Delta Mask is 1.5 µm. If you need structures smaller than this please write it specificly in the e-mail. Be aware that this will increase the price by at least a factor of 3. | ||