Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6: Difference between revisions
No edit summary |
No edit summary |
||
| Line 2: | Line 2: | ||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
== Test run using AZ resist 24/9-2012 == | == Test run using AZ resist 24/9-2012 == | ||
<!-- revised 1/6-2015 by jmli --> | <!-- revised 1/6-2015 by jmli --> | ||