Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Exposure mode== | ==Exposure mode== | ||
Aligner: Maskless 02 offers two exposure modes. The exposure mode is selected during | Aligner: Maskless 02 offers two exposure modes. The exposure mode is selected during design conversion. | ||
'''High quality (4)''' mode is used for optimal resolution and minimum stripe stitching effects. | '''High quality (4)''' mode is used for optimal resolution and minimum stripe stitching effects. | ||