Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings: Difference between revisions

Revision as of 14:46, 18 August 2021

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Made by bghe@nanolab in 2015

	Lower plate	Upper plate
SIMS setting for different materials
Ti	-1
Si	-1	(2)
Al	-1	1
Cr	-1
Ni	-6

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	''Made by bghe@nanolab in 2015''		''Made by bghe@nanolab in 2015''