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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
Line 533: Line 533:
==Top Side Alignment==
==Top Side Alignment==


'''Overlay accuracy (specs):''' 0.5µm
'''Overlay accuracy (spec):''' 0.5µm


'''Camera field of view (W x H):''' <br>
'''Camera field of view (W x H):''' <br>
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