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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
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!Comment
!Comment
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|-style="background:WhiteSmoke; color:black"
|rowspan="2" align="center"|Align-flip180-align, 1 point
|'''X'''
| 0.25±0.25
|rowspan="2" align="center"|1µm verniers, April 2019
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|-style="background:WhiteSmoke; color:black"
|'''Y'''
| 0.25±0.25


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