Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!colspan="2" align="center"| | !colspan="2" align="center"| | ||
!Offset [µm] | !Offset (median) [µm] | ||
!Comment | !Comment | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| -0.75±0. | | -0.75±0.125 | ||
|- | |- | ||