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| ==Resolution== | | ==Resolution== |
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| *'''5206E''' 0.5µm 375nm, dev 2xSP30s | | *SAT results? |
| Fast: 60mJ/cm<sup>2</sup>; defoc -6 (1µm, not optimized)
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| Quality: 60mJ/cm<sup>2</sup>; defoc -6 (~750nm, not optimized)
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| *'''5214E''' 1.5µm 405nm, dev SP60s
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| Fast: 90mJ/cm<sup>2</sup>; defoc -2 (1-2µm)
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| *'''5214E''' 1.5µm 375nm, dev SP60s
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| Fast: 65mJ/cm<sup>2</sup>; defoc 2 (~1µm)
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| Quality: 65mJ/cm<sup>2</sup>; defoc 2 (~750nm)
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| *'''MiR 701''' 1.5µm 405nm, PEB 60s@110°C dev SP60s
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| Fast: 200mJ/cm<sup>2</sup>; defoc -5 (~1µm, not optimized)
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| *'''MiR 701''' 1.5µm 375nm, PEB 60s@110°C dev SP60s
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| Fast: 170mJ/cm<sup>2</sup>; defoc -5 (1µm)
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| Quality: 180mJ/cm<sup>2</sup>; defoc -6 (750nm)
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| *'''nLOF 2020''' 2µm 375nm, PEB 60s@110°C dev SP60s
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| Fast: 400mJ/cm<sup>2</sup>; defoc 5 (~1µm, not optimized)
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| Quality: 400mJ/cm<sup>2</sup>; defoc 0 (1µm)
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