Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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Quality: 400mJ/cm<sup>2</sup>; defoc 0 (1µm) | Quality: 400mJ/cm<sup>2</sup>; defoc 0 (1µm) | ||
'''Data is for Si and optical autofocus unless otherwise stated''' | |||
{|border="1" cellspacing="1" cellpadding="7" style="text-align:left;" | |||
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|- | |||
|-style="background:silver; color:black" | |||
| | |||
!Thickness | |||
!Laser | |||
!Dose | |||
!Defoc | |||
!Resolution | |||
!Comments | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!rowspan="2"|AZ 5206E | |||
|rowspan="2"|1.5 µm | |||
|375nm | |||
|60 mJ/cm<sup>2</sup> | |||
|-6 | |||
|Positive process | |||
|comment | |||
|-style="background:WhiteSmoke; color:black" | |||
|2.2 µm | |||
|90 mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!rowspan="2"|AZ 5214E | |||
|1.5 µm | |||
|22? mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |||
|rowspan="2"|Image reversal process. | |||
Reversal bake: 120s at 110°C.<br>Flood exposure after reversal bake: 195 mJ/cm<sup>2</sup> | |||
|-style="background:LightGrey; color:black" | |||
|2.2 µm | |||
|25 mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ 4562 | |||
|10 µm | |||
|520-?? mJ/cm<sup>2</sup> | |||
|Multiple puddle, 4 x 60 s | |||
|Multiple exposure with 10 s pauses is recommended. | |||
Process not yet established. | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!rowspan="3"|AZ MiR 701 | |||
|1.5 µm | |||
|169 mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |||
|rowspan="2"|PEB: 60 s at 110°C | |||
|-style="background:LightGrey; color:black" | |||
|2 µm | |||
|~200 mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |||
|-style="background:LightGrey; color:black" | |||
|4 µm | |||
|~280 mJ/cm<sup>2</sup> | |||
|Single puddle, 60 s | |||
|rowspan="1"|PEB: 60 s at 110°C | |||
Process adopted from process logs. | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ nLOF 2020 | |||
|1.5 µm | |||
|104 mJ/cm<sup>2</sup> | |||
|Single puddle, 30 s | |||
|PEB: 60 s at 110°C | |||
Use 60 s development for lift-off | |||
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|} | |||
<br clear="all" /> | |||
==Writing speed== | ==Writing speed== | ||