Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures: Difference between revisions
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Below are some etched silicon nanostructures with the recipe '''DREM 1kW nano''' | Below are some etched silicon nanostructures with the recipe '''DREM 1kW nano''' | ||
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| [[Image:DREM1pic1.jpg |frame|left|x300px|200nm trenches etched with 125 cycles, cross section view]] | |||
| [[Image:DREM1pic2.jpg |frame|x300px|200nm pillars etched with 100 cycles, cross section view]] | |||
| [[Image:Twinx.jpg |frame|x300px|The twin Pegasi (3 and 4) have just been rolled into the lab on July 3rd 2018. It will occupy the place that Cluster 2 had. ]] | |||
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Below are some etched silicon nanostructures with the recipe '''DREM 0.5kW nano''' | Below are some etched silicon nanostructures with the recipe '''DREM 0.5kW nano''' | ||