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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 423: Line 423:
|NA
|NA
|rowspan="2"|NA
|rowspan="2"|NA
| 0.0±0.05
| 0.25±0.15
| 0.0±0.05
| 0.25±0.05
| 0.0±1.2
| 1.7±1.7
| 0.0±1.7
| 2.2±1.3


|-
|-
Line 432: Line 432:
|'''Y'''
|'''Y'''
| NA
| NA
| 0.0±0.05
| 0.3±0.13
| 0.0±0.05
| 0.29±0.05
| 0.0±1.2
| 0.8±1.7
| 0.0±1.7
| 0.0±1.7


Line 444: Line 444:
| -1
| -1
|rowspan="2" align="center"|0.001
|rowspan="2" align="center"|0.001
| 0.0±0.05
| 0.2±0.05
| 0.0±0.05
| 0.17±0.05
| 0.0±1.2
| -0.6±1.7
| 0.0±1.7
| 0.3±1.2


|-
|-
Line 453: Line 453:
|'''Y'''
|'''Y'''
| -1
| -1
| 0.0±0.05
| 0.4±0.05
| 0.0±0.05
| 0.42±0.05
| 0.0±1.2
| 0.6±1.7
| 0.0±1.7
| 0.6±1.2


|-
|-
Line 465: Line 465:
| -6
| -6
|rowspan="2" align="center"|0.002
|rowspan="2" align="center"|0.002
| 0.0±0.05
| -0.05±0.13
| 0.0±0.05
| -0.06±0.05
| 0.0±1.2
| -1.9±1.7
| 0.0±1.7
| 0.8±1.3


|-
|-
Line 474: Line 474:
|'''Y'''
|'''Y'''
| -2
| -2
| 0.0±0.05
| 0.3±0.05
| 0.0±0.05
| 0.3±0.05
| 0.0±1.2
| -0.6±1.7
| 0.0±1.7
| 1.1±1.7


|}
|}