Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 423: | Line 423: | ||
|NA | |NA | ||
|rowspan="2"|NA | |rowspan="2"|NA | ||
| 0. | | 0.25±0.15 | ||
| 0. | | 0.25±0.05 | ||
| | | 1.7±1.7 | ||
| | | 2.2±1.3 | ||
|- | |- | ||
| Line 432: | Line 432: | ||
|'''Y''' | |'''Y''' | ||
| NA | | NA | ||
| 0. | | 0.3±0.13 | ||
| 0. | | 0.29±0.05 | ||
| 0. | | 0.8±1.7 | ||
| 0.0±1.7 | | 0.0±1.7 | ||
| Line 444: | Line 444: | ||
| -1 | | -1 | ||
|rowspan="2" align="center"|0.001 | |rowspan="2" align="center"|0.001 | ||
| 0. | | 0.2±0.05 | ||
| 0. | | 0.17±0.05 | ||
| 0. | | -0.6±1.7 | ||
| 0. | | 0.3±1.2 | ||
|- | |- | ||
| Line 453: | Line 453: | ||
|'''Y''' | |'''Y''' | ||
| -1 | | -1 | ||
| 0. | | 0.4±0.05 | ||
| 0. | | 0.42±0.05 | ||
| 0. | | 0.6±1.7 | ||
| 0. | | 0.6±1.2 | ||
|- | |- | ||
| Line 465: | Line 465: | ||
| -6 | | -6 | ||
|rowspan="2" align="center"|0.002 | |rowspan="2" align="center"|0.002 | ||
| 0. | | -0.05±0.13 | ||
| 0. | | -0.06±0.05 | ||
| | | -1.9±1.7 | ||
| 0. | | 0.8±1.3 | ||
|- | |- | ||
| Line 474: | Line 474: | ||
|'''Y''' | |'''Y''' | ||
| -2 | | -2 | ||
| 0. | | 0.3±0.05 | ||
| 0. | | 0.3±0.05 | ||
| 0. | | -0.6±1.7 | ||
| | | 1.1±1.7 | ||
|} | |} | ||