Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 425: | Line 425: | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1. | | 0.0±1.2 | ||
| 0.0±1. | | 0.0±1.7 | ||
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| Line 434: | Line 434: | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1. | | 0.0±1.2 | ||
| 0.0±1. | | 0.0±1.7 | ||
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| Line 446: | Line 446: | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1. | | 0.0±1.2 | ||
| 0.0±1. | | 0.0±1.7 | ||
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| Line 455: | Line 455: | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1. | | 0.0±1.2 | ||
| 0.0±1. | | 0.0±1.7 | ||
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| Line 467: | Line 467: | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1. | | 0.0±1.2 | ||
| 0.0±1. | | 0.0±1.7 | ||
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| Line 476: | Line 476: | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1. | | 0.0±1.2 | ||
| 0.0±1. | | 0.0±1.7 | ||
|} | |} | ||