Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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*Speed vs. dose (375nm + 405nm) | *Speed vs. dose (375nm + 405nm) | ||
The writing speed remains almost constant up to a dose of 1000mJ/cm<sup>2</sup>. Due to the higher power of the 405nm laser, the writing speed remains high up to a dose of 1000mJ/cm<sup>2</sup> for this wavelength. After this point, the writing speed decreases almost linearly with dose. For 375nm, the writing speed is 50% at a dose of 4500mJ/cm<sup>2</sup>, while 405nm requires a dose of 8500mJ/cm<sup>2</sup> to reach that speed. | |||
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