Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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| BSA marks positionned at x = ±20mm on a 2" wafer || BSA marks positionned at x = ±40mm on a 4" wafer || BSA marks positionned at x = ±50mm on a 6" wafer || BSA marks positionned at x = ±50mm on | | BSA marks positionned at x = ±20mm on a 2" wafer || BSA marks positionned at x = ±40mm on a 4" wafer || BSA marks positionned at x = ±50mm on a 6" wafer || BSA marks positionned at x = ±50mm on an 8" wafer | ||
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