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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 472: Line 472:
375nm, high res camera
375nm, high res camera
|'''X'''
|'''X'''
| 0±0
| 100?
|rowspan="2" align="center"|0.000±0.000
|rowspan="2" align="center"|0.00?
| 0.0±0.05
| -0.05±0.1
| 0.0±0.05
| -0.01±0.05
| 0.0±1.18
| 1.7±3.3
| 0.0±1.67
| 0.6±2.4


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0±0
| 100?
| 0.0±0.05
| 0.2±0.05
| 0.0±0.05
| 0.18±0.05
| 0.0±1.18
| 0±3.3
| 0.0±1.67
| 0±2.4


|-
|-
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