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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Line 324: Line 324:
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2" align="center"|No flat alignment
|rowspan="2" align="center"|9 points, 60x60mm2
|'''X'''
|'''X'''
| 0.0±0.05
| -0.15±0.05
| 0.0±0.05
| -0.16±0.05
| 0.0±1.67
| 0.8±1.7
| 0.0±1.18
| -3.6±1.2


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0.0±0.05
| 0.25±0.125
| 0.0±0.05
| 0.26±0.11
| 0.0±1.67
| -0.3±1.7
| 0.0±1.18
| -0.3±1.2


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2" align="center"|With flat alignment
|rowspan="2" align="center"|All 25 points
|'''X'''
|'''X'''
| 0.0±0.05
| -0.150±0.075
| 0.0±0.05
| NA
| 0.0±1.67
| NA
| 0.0±1.18
| NA


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0.0±0.05
| 0.250±0.125
| 0.0±0.05
| NA
| 0.0±1.67
| NA
| 0.0±1.18
| NA


|}
|}
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