Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5mm from the center. | '''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5mm from the center. | ||
''' | '''Camera field of view:''' 640µm x 480µm | ||
*Tested, 2-3µm error in X observed | *Tested, 2-3µm error in X observed | ||