Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 157: | Line 157: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
! | ! | ||
!Average [mRad] | ! Average [mRad] | ||
!Range [mRad] | ! Range [mRad] | ||
|- | |- | ||
| Line 165: | Line 165: | ||
|Optical | |Optical | ||
autofocus | autofocus | ||
|3.7 | | 3.7 | ||
|±13.9 | | ±13.9 | ||
|- | |- | ||
| Line 172: | Line 172: | ||
|Pneumatic | |Pneumatic | ||
autofocus | autofocus | ||
|-3.7 | | -3.7 | ||
|±1.4 | | ±1.4 | ||
|} | |} | ||