Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Top Side Alignment== | ==Top Side Alignment== | ||
'''Field of view:''' | |||
'''High Res''' 190µm x 140µm | |||
'''Low Res:''' 640µm x 480µm | |||
'''Overview:''' 12mm x 9mm | |||
*4 marks (before final installation) | *4 marks (before final installation) | ||
*Scaling (375nm, high res camera) | *Scaling (375nm, high res camera) | ||