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Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions

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The system will remove small surface roughness, so it will not count as particle contaminations.  
The system will remove small surface roughness, so it will not count as particle contaminations.  


The system is mainly being used for quality control of the PECVDs and LPCVD nitride furnaces in the cleanroom. Other users will have to contact the responsible persons (the Thin Film group), if they want to make some particle measurements.
The system is mainly being used for quality control of the PECVDs and LPCVD nitride furnaces in the cleanroom.  
 
Users will have to contact the responsible persons (the Thin Film group), if they want to make some particle measurements.


'''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]'''
'''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]'''
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