Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 521: | Line 521: | ||
375nm, high res camera | 375nm, high res camera | ||
|'''X''' | |'''X''' | ||
| 0. | | 0.05±0.075 | ||
| 0. | | 0.07±0.075 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| 0. | | 0.150±0.05 | ||
| 0. | | 0.128±0.05 | ||
|- | |- | ||
| Line 535: | Line 535: | ||
375nm, high res camera | 375nm, high res camera | ||
|'''X''' | |'''X''' | ||
| 0. | | -0.025±0.05 | ||
| 0. | | -0.005±0.05 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| 0. | | 0.1±0.05 | ||
| 0. | | 0.12±0.05 | ||
|- | |- | ||
| Line 549: | Line 549: | ||
405nm, high res camera | 405nm, high res camera | ||
|'''X''' | |'''X''' | ||
| 0. | | 0.1±0.075 | ||
| 0. | | 0.108±0.075 | ||
|- | |- | ||
| Line 556: | Line 556: | ||
|'''Y''' | |'''Y''' | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0. | | 0.016±0.05 | ||
|} | |} | ||