Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 275: | Line 275: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2" align="center"|No flat alignment | |rowspan="2" align="center"|No flat alignment | ||
|'''X''' | |'''X''' | ||
| 0.0±0.05 | | 0.0±0.05 | ||