Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 373: | Line 373: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
405nm, high res camera | |||
|'''X''' | |'''X''' | ||
| | | 0±0 | ||
|rowspan="2"| | |rowspan="2" align="center"|0.000±0.000 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| Line 385: | Line 385: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| | | 0±0 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±1.18 | | 0.0±1.18 | ||
| 0.0±1.67 | | 0.0±1.67 | ||
|} | |||
'''Scaled first print:''' | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:center;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!colspan="2"|MLA-MLA | |||
!Scaling [ppm] | |||
!Shearing [mRad] | |||
!Shift (median) [µm] | |||
!Misplacement [µm] | |||
!Run-out (gain) [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
375nm, high res camera | |||
|'''X''' | |'''X''' | ||
| 0±0 | | 0±0 | ||
| Line 407: | Line 424: | ||
|'''Y''' | |'''Y''' | ||
| 0±0 | | 0±0 | ||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|4 alignment marks | |||
375nm, high res camera | |||
|'''X''' | |||
| not used | |||
|rowspan="2"|not used | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| not used | |||
| 0.0±0.05 | | 0.0±0.05 | ||
| 0.0±0.05 | | 0.0±0.05 | ||