Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

@@ Line 397: / Line 397: @@
 *Tested, 2-3µm error in X observed
 *Corrected
+{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
+|-
+|-
+|-style="background:silver; color:black"
+!colspan="2" align="center"|
+!Shift (median) [µm]
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+|rowspan="2" align="center"|"Align-flip 180-align"-method
+|'''X'''
+| 0.0±0.5
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''Y'''
+| 0.0±0.5
+|-
+|-style="background:WhiteSmoke; color:black"
+|rowspan="2" align="center"|KOH-window
+|'''X'''
+| 0.0±0.5
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''Y'''
+| 0.0±0.5
+|}
 ==Advanced Field alignment (TSA)==
@@ Line 402: / Line 436: @@
 *Scaled first print, 10 fields (375nm, high res camera)
 *4 marks, 25 fields (405nm, high res camera)
+{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
+|-
+|-
+|-style="background:silver; color:black"
+!colspan="2" align="center"|
+!Shift (median) [µm]
+!Misplacement [µm]
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+|rowspan="2" align="center"|No flat alignment
+(two samples)
+|'''X'''
+| 0.0±0.05
+| 0.0±0.05
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''Y'''
+| 0.0±0.05
+| 0.0±0.05
+|-
+|-style="background:WhiteSmoke; color:black"
+|rowspan="2" align="center"|With flat alignment
+|'''X'''
+| 0.0±0.05
+| 0.0±0.05
+|-
+|-style="background:WhiteSmoke; color:black"
+|'''Y'''
+| 0.0±0.05
+| 0.0±0.05
+|}