Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 313: | Line 313: | ||
*4 marks (before final installation) | *4 marks (before final installation) | ||
*Scaling (375nm, high res camera) | *Scaling (375nm, high res camera) | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:center;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!colspan="2"|MLA-MLA | |||
!Scaling [ppm] | |||
!Shearing [mRad] | |||
!Shift (median) [µm] | |||
!Misplacement [µm] | |||
!Run-out (gain) [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|2 alignment marks | |||
375nm, high res camera | |||
|'''X''' | |||
|NA | |||
|rowspan="2"|NA | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| NA | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|4 alignment marks | |||
(three samples) | |||
|'''X''' | |||
| 0±0 | |||
|rowspan="2" align="center"|0.002±0.001 | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 0±0 | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|2 alignment marks | |||
after calibration | |||
(three samples) | |||
|'''X''' | |||
|NA | |||
|rowspan="2"|NA | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| NA | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.18 | |||
| 0.0±1.67 | |||
|} | |||
==Back Side Alignment== | ==Back Side Alignment== | ||