Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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[[Image:section under construction.jpg|70px]] | [[Image:section under construction.jpg|70px]] | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!colspan="2" align="center"| | |||
!Shift (median) [µm] | |||
!Misplacement [µm] | |||
!Run-out (gain) [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|No flat alignment | |||
(two samples) | |||
|'''X''' | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.67 | |||
| 0.0±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.67 | |||
| 0.0±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|With flat alignment | |||
|'''X''' | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.67 | |||
| 0.0±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 0.0±0.05 | |||
| 0.0±0.05 | |||
| 0.0±1.67 | |||
| 0.0±1.18 | |||
|} | |||
==Top Side Alignment== | ==Top Side Alignment== | ||