Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Exposure mode== | ==Exposure mode== | ||
Aligner: Maskless 02 offers two exposure modes: 'high quality' (4) for optimal resolution and minimum stripe stitching effects; and 'fast' for maximum exposure speed. | |||
==Resolution== | ==Resolution== | ||