Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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|X-Large (60) | |X-Large (60) | ||
55000 mJ/cm<sup>2</sup> | 55000 mJ/cm<sup>2</sup> | ||
|[[Image: | |[[Image:MLA150_SU8_Pillars_XLarge.jpg|350px]] | ||
|[[Image:MLA150_SU8_Rings_XLarge.jpg|350px]] | |||
|} | |} | ||