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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 158: Line 158:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
|
|
!375nm
!Large
!405nm
!XLarge
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 5214E
!Intensity measurements
|0.95
|3.3
|1.3
|17.4
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!AZ 4562
!150µm SU-8 dose tests
|?
|~3
|?
|~10
|-
 
|-
|-style="background:WhiteSmoke; color:black"
!AZ MiR 701
|1
|1.2
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!AZ nLOF 2020
!1.5µm AZ MiR 701 dose tests
|3
|7.5
|NA
|20.8
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!SU-8
!10µm AZ 4562 dose tests
|10-15
|?
|NA
|?
|-
|-
|}
|}


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