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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 108: Line 108:
==Advanced Field alignment (TSA)==
==Advanced Field alignment (TSA)==
*4 marks, 25 fields (375nm, high res camera)
*4 marks, 25 fields (375nm, high res camera)
*Scaling, 10 fields (375nm, high res camera)
*Scaled first print, 10 fields (375nm, high res camera)
*4 marks, 25 fields (405nm, high res camera)
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