Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 69: | Line 69: | ||
==Labelling== | ==Labelling== | ||
labelfile.lbl (tab-delimited ASCII file) | |||
X | Y | UNIT | HEIGHT | UNIT | TITLE | X | Y | UNIT | HEIGHT | UNIT | TITLE | ||
-16000 | -46000 | um | 2000 | um | TARAN DTU Nanolab 20190320 | -16000 | -46000 | um | 2000 | um | TARAN DTU Nanolab 20190320 | ||
Some special characters are not allowed (e.g. ; ). | |||
=Alignment= | =Alignment= | ||