Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Writing speed== | ==Writing speed== | ||
*Speed vs. area (375nm) | *Speed vs. area (375nm) | ||
**Online | **Online | ||
**Offline | **Offline | ||
*Speed vs. dose (375nm + 405nm) | |||
[[ | [[MLA150_speedVSarea|400x400px|thumb|The writing speed of Aligner: Maskless 02 as a function of the exposure dose]] | ||
[[Image:WritingSpeedVSDose.JPG|400x400px|thumb|The writing speed of Aligner: Maskless 01 as a function of the exposure dose]] | [[Image:WritingSpeedVSDose.JPG|400x400px|thumb|The writing speed of Aligner: Maskless 01 as a function of the exposure dose]] | ||