Jump to content

Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 50: Line 50:


==Top Side Alignment==
==Top Side Alignment==
*4 marks (?nm, probably low res camera)
*4 marks (before final installation)
*Scaling (375nm, high res camera)
*Scaling (375nm, high res camera)