Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 50: | Line 50: | ||
==Top Side Alignment== | ==Top Side Alignment== | ||
*4 marks ( | *4 marks (before final installation) | ||
*Scaling (375nm, high res camera) | *Scaling (375nm, high res camera) | ||