Specific Process Knowledge/Etch/Etching of Silicon/Si etch using ASE: Difference between revisions
| Line 163: | Line 163: | ||
| | | | ||
Etch cycle | Etch cycle | ||
SF6 flow [sccm]:50 | *SF6 flow [sccm]:50 | ||
C4F8 flow [sccm]:100 | *C4F8 flow [sccm]:100 | ||
Pressure [mTorr] 20 | *Pressure [mTorr] 20 | ||
Coil power [W]: 350 | *Coil power [W]: 350 | ||
Platen power [W]: 30 | *Platen power [W]: 30 | ||
Cycle Time [s]: 5 | *Cycle Time [s]: 5 | ||
Dep. Cycle | Dep. Cycle | ||
C4F8 flow [sccm]: 100 | *C4F8 flow [sccm]: 100 | ||
Pressure [mTorr]: 20 | *Pressure [mTorr]: 20 | ||
Coil power [W]: 500 | *Coil power [W]: 500 | ||
Platen power [W]: 0 | *Platen power [W]: 0 | ||
Cycle Time [s]: 3 | *Cycle Time [s]: 3 | ||
Temperature [Deg. C] 20 | *Temperature [Deg. C] 20 | ||
| | | | ||
Etch cycle | Etch cycle | ||
SF6 flow [sccm]:50 | *SF6 flow [sccm]:50 | ||
C4F8 flow [sccm]:100 | *C4F8 flow [sccm]:100 | ||
Pressure [mTorr] 10 | *Pressure [mTorr] 10 | ||
Coil power [W]: 350 | *Coil power [W]: 350 | ||
Platen power [W]: 30 | *Platen power [W]: 30 | ||
Cycle Time [s]: 5 | *Cycle Time [s]: 5 | ||
Dep. Cycle | Dep. Cycle | ||
C4F8 flow [sccm]: 100 | *C4F8 flow [sccm]: 100 | ||
Pressure [mTorr]: 10 | *Pressure [mTorr]: 10 | ||
Coil power [W]: 500 | *Coil power [W]: 500 | ||
Platen power [W]: 0 | *Platen power [W]: 0 | ||
Cycle Time [s]: 3 | *Cycle Time [s]: 3 | ||
Temperature [Deg. C] -10 | *Temperature [Deg. C] -10 | ||
| | | | ||
Etch cycle | Etch cycle | ||
SF6 flow [sccm]:50 | *SF6 flow [sccm]:50 | ||
C4F8 flow [sccm]:100 | *C4F8 flow [sccm]:100 | ||
Pressure [mTorr] 10 | *Pressure [mTorr] 10 | ||
Coil power [W]: 350 | *Coil power [W]: 350 | ||
Platen power [W]: 10 | *Platen power [W]: 10 | ||
Cycle Time [s]: 5 | *Cycle Time [s]: 5 | ||
Dep. Cycle | Dep. Cycle | ||
C4F8 flow [sccm]: 100 | *C4F8 flow [sccm]: 100 | ||
Pressure [mTorr]: 10 | *Pressure [mTorr]: 10 | ||
Coil power [W]: 500 | *Coil power [W]: 500 | ||
Platen power [W]: 0 | *Platen power [W]: 0 | ||
Cycle Time [s]: 3 | *Cycle Time [s]: 3 | ||
Temperature [Deg. C] 20 | *Temperature [Deg. C] 20 | ||
|- | |- | ||
| | | | ||