Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions
| Line 7: | Line 7: | ||
==Wet etching of Titanium== | ==Wet etching of Titanium== | ||
[[Image:Fumehood1-2.jpg|300x300px|thumb|Fume hood 01 and 02 in Cleanroom D-3 for working with acids and bases.<br>Wet etching of titanium can be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]] | |||
[[Image:Fumehood1-2.jpg|300x300px|thumb|Fume hood | |||
We have two solutions for wet titanium etching: | We have two solutions for wet titanium etching: | ||
# BHF ( | # BHF (beaker in fumehood) | ||
# Cold RCA1 (fumehood) | # Cold RCA1 (beaker in fumehood) | ||
<br> | <br> | ||
Etching titanium | Etching titanium in BHF or RCA1 mix is made by making your own solution in a beaker in either Fumehood 01 or 02 in Cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]. | ||
| Line 89: | Line 88: | ||
!Allowed materials | !Allowed materials | ||
| | | | ||
Practically no restrictions when used in beaker | Practically no restrictions when used in beaker. Make sure to use a plastic beaker, since glass will be attacked by BHF/HF. | ||
Make a note on the beaker of which materials have been processed. | Make a note on the beaker of which materials have been processed. | ||
| | | | ||