LabAdviser/314/Microscopy 314-307/SEM/QFEG

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DTU Cen's QFEG positioned in building 314 room no. 010

The FEI QFEG 200 Cryo ESEM FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in several modes, such as high vacuum, low vacuum, environmental mode, room temperature, low temperature and cryo. Our QFEG is fitted with an EDS detector, which allows for analytical measurements in all the operation modes. With the cryo transfer system available, it is especially suited for cryo experiments.

Process information

• Electron source

Field emission gun

• Accelerating voltage

500 V- 30 kV

• Resolution

2 nm at 30 kV (SE)

• Imaging detectors

Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera

• Imaging modes

High, low vacuum and environmental

• Analytical capabilities

Energy dispersive X-rays (Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)

• Attachments

Quorum PP2000 Cryo System, FEI Peltier stage (-10°C to 22°C).

Equipment performance and process related parameters

Equipment		FEI QFEG 200 Cryo ESEM
Purpose	Vizualization and Microanalysis	Vizualization of surfaces (topography and Z contrast) Vizualization of projected image (BF STEM image) Energy Dispersive X-ray analysis
Performance	Resolution	The resolution of QFEG dependends on the sample and the operation mode!
		2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics	Detectors	ETD- Everhart-Thornley for secondary electrons BSD- Solid state Back Scattered Detector LFD- Large Field Detector for secondary electrons GSED- Gaseous Secondary Electron Detector GBSD- Gaseous Backscattered Electron Detector GAD- Gaseous Analystical Detector STEM- right field Scanning Tramission Electron detector vCD- low voltage BSED CCD camera
	Electron source	Field Emission - Tungsten filament
	Stage (room temperature)	X, Y: 25 × 25 mm T: 0 to 60o (Full tilt require removment of cryo cold trap.) R: 360o
	Peltier stage	FEI Peltier stage -10o to 22o
	Cryo stage	Quorum PP2000 Cryo System
	EDS	Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV
	Operating pressures	High vacuum (10-4 Pa), Low vacuum and Enviromental mode (up to 2700Pa)
Substrates	Sample sizes	No actual limit (limitted by stage movment and detector position).
	Allowed materials	Conducttors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)