Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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=Syringe processes= | =Syringe processes= | ||
Use of the syringe requires special training, and would as a starting point require batches in excess of 20 wafers. | |||
==AZ 4562 coating (syringe)== | ==AZ 4562 coating (syringe)== | ||