Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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==Al2O3 using Ti mask etching with the "Au acceptance recipe"== | |||
''This work was done by Sezer Köse @fotonik April 2019'' | |||
[[File:Sezer Al2O3 and Ti.JPG|400px]] | |||