Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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==Defocus== | ==Defocus== | ||
The optimal defocus setting is probably a function of the resist thickness, but for 1.5µm resist, a defocus around | The optimal defocus setting is probably a function of the resist thickness, but for 1.5µm resist, a defocus around 0 seems to be optimal (before 2019-01-07 this value was -4). | ||
==Writing speed== | ==Writing speed== | ||