Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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* Red (165x165mm) | * Red (165x165mm) | ||
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|style="background:LightGrey; color:black" | |style="background:LightGrey; color:black"|Output power @100%(laser TB width – picosecond) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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* 1064nm, F255mm : 42,40W | * 1064nm, F255mm : 42,40W | ||
| Repetition rate : | | Repetition rate : 200 kHz | ||
* 355nm, F103mm : | * 355nm, F103mm : 15 W | ||
* 532nm, F255mm: | * 532nm, F255mm: not measured | ||
* 1064nm, F255mm: | * 1064nm, F255mm: 32 W | ||
Repetition rate : 1000 kHz | Repetition rate : 1000 kHz | ||
* 355nm, F103mm : | * 355nm, F103mm : 5,5 W | ||
* 532nm : | * 532nm : not measured | ||
* 1064nm : | * 1064nm : 38 W | ||
Repetition rate : 8000 kHz | Repetition rate : 8000 kHz | ||
* 355nm, F103mm: 0, | * 355nm, F103mm: 0,3 W | ||
* 532nm, F255mm: | * 532nm, F255mm: not measured | ||
* 1064nm, F255mm: | * 1064nm, F255mm: 41 W | ||
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