Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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== Process information == | == Process information == | ||
*[[/Acceptance Test|Acceptance Test]]. Describes thickness uniformity tests, side wall deposition tests, sheet resistance tests and tests of the ion source for substrate cleaning. | *[[/Acceptance Test|Acceptance Test]]. Describes '''thickness uniformity''' tests, '''side wall deposition''' tests, '''sheet resistance''' tests and tests of the '''ion source''' for substrate cleaning. | ||
====Materials for e-beam evaporation==== | ====Materials for e-beam evaporation==== | ||