Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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=AFM Icon = | =AFM Icon 1 & 2 = | ||
[[Image:P6180008.JPG|right|thumb|300px| AFM Icon-Pt Positioned in clean room: C-1]] | [[Image:P6180008.JPG|right|thumb|300px| AFM Icon-Pt Positioned in clean room: C-1]] | ||
[[Image:l.jpg|right|thumb|300px| AFM Icon-Pt 2 Positioned in the basement of building 346]] | |||
DTU Nanolab has two pieces of Bruker AFM Dimension Icon-Pt. AFM stands for Atomic Force Microscope which is a scanning probe microscope where a sharp probe is scanned across a surface either in contact mode, tapping mode or PeakForce tapping mode. The outcome is a topographic plot of the surface. It has a lateral solution of about 1 nm and a vertical resolution of less than 1 Å which makes it very suitable for topographic characterization in the nanometer regime. The limiting factor however is often the size of the probe in use. The tip radius of curvature (ROC) can be from 2 nm up to more than 20 nm depending on the chosen probe. The half cone angle of the tip can vary from less than 3<sup>o</sup> to over 25<sup>o</sup> giving problems resolving high aspect ratio structures. | |||
The main purposes are surface roughness measurements and step/structure high measurements in the nanometer and sub-micrometer regime. For larger structure see the [[Specific Process Knowledge/Characterization/Topographic measurement|topografic measurement]] page. | The main purposes are surface roughness measurements and step/structure high measurements in the nanometer and sub-micrometer regime. For larger structure see the [[Specific Process Knowledge/Characterization/Topographic measurement|topografic measurement]] page. | ||
To get some product information from the vendor take a look at Bruker's homepage [http://www.bruker-axs.com/atomicforcemicroscopy.html] | To get some product information from the vendor take a look at Bruker's homepage [http://www.bruker-axs.com/atomicforcemicroscopy.html] | ||
'''Before training''': Please watch the training videos before the training on the instrument: | '''Before training''': Please watch the training videos before the training on the instrument: | ||
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'''The user manual, quality control procedure and results and contact information can be found in LabManager:''' <br/> | '''The user manual, quality control procedure and results and contact information can be found in LabManager:''' <br/> | ||
http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=337 AFM Icon 1 in LabManager]<br> | |||
http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=337 AFM Icon 2 in LabManager] | |||
==Process Information== | ==Process Information== | ||